FORM 3

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 INITIAL STATEMENT OF BENEFICIAL OWNERSHIP OF SECURITIES Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934, Section 17(a) of the Public Utility Holding Company Act of 1935 or Section 30(h) of the Investment Company Act of 1940

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1. Name and Address of Reporting Person *   Shaner William James 2. Date of Event Requiring Statement (Month/Day/Year) 02/24/2010 3. Issuer Name and Ticker or Trading Symbol ENTEGRIS INC [ENTG] (Last) (First) (Middle) 9754 SUMMIT ASH COURT 4. Relationship of Reporting Person(s) to Issuer (Check all applicable) _____ Director _____ 10% Owner __X__ Officer (give title below) _____ Other (specify below) Vice President, GM, ME Div. 5. If Amendment, Date Original Filed(Month/Day/Year) 03/02/2010 (Street) COLORADO SPRINGS, CO 80920 6. Individual or Joint/Group Filing(Check Applicable Line) _X_ Form filed by One Reporting Person ___ Form filed by More than One Reporting Person (City) (State) (Zip) Table I - Non-Derivative Securities Beneficially Owned

1.Title of Security (Instr. 4) 2. Amount of Securities Beneficially Owned (Instr. 4) 3. Ownership Form: Direct (D) or Indirect (I) (Instr. 5) 4. Nature of Indirect Beneficial Ownership (Instr. 5) Common Stock 79,930 (1) D   Common Stock 2,774 I By Spouse

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.			SEC 1473 (7-02)
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Table II - Derivative Securities Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)

1. Title of Derivative Security (Instr. 4)	2. Date Exercisable and Expiration Date (Month/Day/Year)		3. Title and Amount of Securities Underlying Derivative Security (Instr. 4)		4. Conversion or Exercise Price of Derivative Security	5. Ownership Form of Derivative Security: Direct (D) or Indirect (I) (Instr. 5)	6. Nature of Indirect Beneficial Ownership (Instr. 5)
	Date Exercisable	Expiration Date	Title	Amount or Number of Shares
Employee Stock Option (right to buy)	  (2)	07/11/2010	Common Stock	225	$ 11	D	Â
Employee Stock Option (right to buy)	  (2)	09/19/2010	Common Stock	2,000	$ 9.63	D	Â
Employee Stock Option (right to buy)	  (2)	04/09/2011	Common Stock	7,500	$ 7.49	D	Â
Employee Stock Option (right to buy)	  (2)	10/15/2011	Common Stock	5,160	$ 8.04	D	Â
Employee Stock Option (right to buy)	  (2)	10/15/2011	Common Stock	13,590	$ 8.04	D	Â
Employee Stock Option (right to buy)	  (2)	10/15/2012	Common Stock	15,078	$ 5.9	D	Â
Employee Stock Option (right to buy)	  (2)	10/15/2012	Common Stock	9,922	$ 5.9	D	Â
Employee Stock Option (right to buy)	  (2)	10/15/2012	Common Stock	7,500	$ 5.9	D	Â
Employee Stock Option (right to buy)	  (2)	10/15/2012	Common Stock	2,500	$ 5.9	D	Â
Employee Stock Option (right to buy)	  (2)	10/22/2013	Common Stock	3,000	$ 11.96	D	Â
Employee Stock Option (right to buy)	  (2)	10/22/2013	Common Stock	20,000	$ 11.96	D	Â
Employee Stock Option (right to buy)	  (2)	10/15/2014	Common Stock	25,000	$ 8.37	D	Â
Employee Stock Option (right to buy)	  (2)	10/15/2014	Common Stock	2,000	$ 8.37	D	Â
Employee Stock Option (right to buy)	  (3)	02/21/2015	Common Stock	23,380	$ 7.07	D	Â
Employee Stock Option (right to buy)	  (4)	12/16/2015	Common Stock	28,000	$ 2.1	D	Â
Employee Stock Option (right to buy)	  (5)	02/19/2016	Common Stock	81,000	$ 1.13	D	Â
Employee Stock Option (right to buy)	  (6)	02/19/2017	Common Stock	31,120	$ 5.4	D	Â

Reporting Owners

Reporting Owner Name / Address	Relationships
	Director	10% Owner	Officer	Other
Shaner William James 9754 SUMMIT ASH COURT COLORADO SPRINGS, CO 80920	Â	Â	  Vice President, GM, ME Div.	Â

Signatures

Peter W. Walcott, Attorney-in-Fact for William J. Shaner		11/17/2010
**Signature of Reporting Person		Date

Explanation of Responses:

*	If the form is filed by more than one reporting person, see Instruction 5(b)(v).
**	Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
(1)	This amendment is to correct an overstatement in the Table 1, Item 2 Amount of Securities Beneficially Owned that were previously reported in the Reporting Person's March 2, 2010 Form 3, as amended.
(2)	This option is fully vested.
(3)	This option is exercisable in three equal annual installments. The first installment became exercisable on 2/21/2009, the second installment became exercisable on 2/21/2010 and the last installment becomes exercisable on 2/21/2011.
(4)	This option is exercisable in four equal annual installments. The first installment became exercisable on 12/16/2009 and the next three installments become exercisable on 12/16/2010, 12/16/2011 and 12/16/2012.
(5)	This option is exercisable in three equal annual installments. The first installment became exercisable on 2/19/2010, the second installment becomes exercisable on 2/19/2011 and the last installment becomes exercisable on 2/19/2012.
(6)	This option is exercisable in three equal annual installments. The first installment becomes exercisable on 2/19/2011, the second installment becomes exercisable on 2/19/2012 and the last installment becomes exercisable on 2/19/2013.

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