FORM 4 Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP OF SECURITIES Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934, Section 17(a) of the Public Utility Holding Company Act of 1935 or Section 30(h) of the Investment Company Act of 1940

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1. Name and Address of Reporting Person * Edlund Todd James   2. Issuer Name and Ticker or Trading Symbol ENTEGRIS INC [ENTG] 5. Relationship of Reporting Person(s) to Issuer (Check all applicable) _____ Director _____ 10% Owner __X__ Officer (give title below) _____ Other (specify below) Vice President, GM, CCS Div. (Last) (First) (Middle) 4956 EAST 255TH STREET 3. Date of Earliest Transaction (Month/Day/Year) 01/25/2013 (Street) ELKO, MN 55020 4. If Amendment, Date Original Filed(Month/Day/Year) 01/29/2013 6. Individual or Joint/Group Filing(Check Applicable Line) _X_ Form filed by One Reporting Person ___ Form filed by More than One Reporting Person (City) (State) (Zip) Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned

1.Title of Security (Instr. 3) 2. Transaction Date (Month/Day/Year) 2A. Deemed Execution Date, if any (Month/Day/Year) 3. Transaction Code (Instr. 8) 4. Securities Acquired (A) or Disposed of (D) (Instr. 3, 4 and 5) 5. Amount of Securities Beneficially Owned Following Reported Transaction(s) (Instr. 3 and 4) 6. Ownership Form: Direct (D) or Indirect (I) (Instr. 4) 7. Nature of Indirect Beneficial Ownership (Instr. 4) Code V Amount (A) or (D) Price Common Stock 01/25/2013   M   17,500 (5) A $ 8.37 101,626 D   Common Stock 01/25/2013   S   17,500 (1) (5) D $ 9.7766 (2) 84,126 D   Common Stock 01/25/2013   M   23,380 (5) A $ 7.07 107,506 D   Common Stock 01/25/2013   S   23,380 (1) (5) D $ 9.7766 (2) 84,126 D   Common Stock 01/28/2013   M   7,000 (5) A $ 2.1 91,126 D   Common Stock 01/28/2013   S   7,000 (1) (5) D $ 10 84,126 D

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.
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Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned
(e.g., puts, calls, warrants, options, convertible securities)

1. Title of Derivative Security (Instr. 3)

2. Conversion or Exercise Price of Derivative Security

3. Transaction Date (Month/Day/Year)

3A. Deemed Execution Date, if any (Month/Day/Year)

4. Transaction Code (Instr. 8)

5. Number of Derivative Securities Acquired (A) or Disposed of (D) (Instr. 3, 4, and 5)

6. Date Exercisable and Expiration Date (Month/Day/Year)

7. Title and Amount of Underlying Securities (Instr. 3 and 4)

8. Price of Derivative Security (Instr. 5)

9. Number of Derivative Securities Beneficially Owned Following Reported Transaction(s) (Instr. 4)

10. Ownership Form of Derivative Security: Direct (D) or Indirect (I) (Instr. 4)

11. Nature of Indirect Beneficial Ownership (Instr. 4)

Code

V

(A)

(D)

Date Exercisable

Expiration Date

Title

Amount or Number of Shares

Employee Stock Option (Right to Buy)

$ 8.37

01/25/2013

M

17,500 (5)

(3)

10/15/2014

Common Stock

17,500

$ 0 (4)

0

D

Employee Stock Option (Right to Buy)

$ 7.07

01/25/2013

M

23,380 (5)

(3)

02/21/2015

Common Stock

23,380

$ 0 (4)

0

D

Employee Stock Option (Right to Buy)

$ 2.1

01/28/2013

M

7,000 (5)

(3)

12/16/2015

Common Stock

7,000

$ 0 (4)

0

D

Reporting Owners

Reporting Owner Name / Address	Relationships
	Director	10% Owner	Officer	Other
Edlund Todd James 4956 EAST 255TH STREET ELKO, MN 55020			Vice President, GM, CCS Div.

Signatures

/s/Peter W. Walcott, Attorney-In-Fact for Todd J. Edlund		01/30/2013
**Signature of Reporting Person		Date

Explanation of Responses:

*	If the form is filed by more than one reporting person, see Instruction 4(b)(v).
**	Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
(1)	These shares were sold pursuant to a 10b5-1 Trading Plan established by the Reporting Person on November 10, 2011.
(2)	The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Securities & Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $9.75 to $9.84, inclusive. The reporting person undertakes to provide Entegris, Inc. any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.
(3)	This option is fully vested.
(4)	These options were granted pursuant to an employee stock option plan that provides for the grant of options in consideration of services as an employee.
(5)	This Form 4/A amends a duplicate Form 4 that was filed on January 29, 2013 at 3:06 p.m. This duplicate was filed in error and with the wrong Filer's CIK number. This Form 4/A is to report that the duplicate Form 4 should be disregarded. The Form 4 filed January 29, 2013 at 2:57 p.m. is the Form 4 that should be relied on to accurately report the transactions in question which information is restated above.

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